Effects of Addition of Resin Particles to Ceria-Based Slurry on Pre-Metal Dielectric Planarization

Publication Information

Title

Japanese:
English:	Effects of Addition of Resin Particles to Ceria-Based Slurry on Pre-Metal Dielectric Planarization

Author

Japanese:	松井之輝, Hajime Eda, Satoko Seta, Takatoshi Ono, Yoshikuni Tateyama, Takeshi Nishioka, Hiroyuki Yano, 益子正文.
English:	Yukiteru Matsui, Hajime Eda, Satoko Seta, Takatoshi Ono, Yoshikuni Tateyama, Takeshi Nishioka, Hiroyuki Yano, Masabumi Masuko.

Language

English

Journal/Book name

Japanese:
English:	Journal of The Electrochemical Society

Volume, Number, Page

Vol. 157 No. 5 pp. H510-H515

Published date

Apr. 2010

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI