Self-annealing at room temperature of Copper electroplating by additive free bath

Publication Information

Title

Japanese:
English:	Self-annealing at room temperature of Copper electroplating by additive free bath

Author

Japanese:	品田絵理, Tso-Fu Mark Chang, 柴田曉伸, 曽根正人.
English:	Eri Shinada, Tso-Fu Mark Chang, Akinobu Shibata, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:	Advanced Metallization Conference 2010

Volume, Number, Page

pp. 94-95

Published date

Oct. 2010

Publisher

Japanese:
English:	The Japan Society of Applied Physics

Conference name

Japanese:
English:	Advanced Metallization Conference 2010: 20th Asian Session

Conference site

Japanese:
English:	The Univ. of Tokyo, Tokyo