低気圧放電プラズマを用いた短波長光源の開発

Publication Information

Title

Japanese:	低気圧放電プラズマを用いた短波長光源の開発
English:	Development of short wavelength light sources using discharge plasma in low pressure condition

Author

Japanese:	渡邊正人, 酒井雄祐, 朱秋石, 黄斌, 石塚裕也, 滝本泰大, 堀田栄喜.
English:	Masato Watanabe, Yusuke Sakai, Zhu Qiushi, Huang Bin, Yuya Ishizuka, yasushi takimoto, Eiki Hotta.

Language

Japanese

Journal/Book name

Japanese:	平成22年電気学会基礎・材料・共通部門大会
English:

Volume, Number, Page

Published date

Sept. 2010

Publisher

Japanese:	電気学会
English:	IEE Japan

Conference name

Japanese:	平成22年電気学会基礎・材料・共通部門大会
English:

Conference site

Japanese:	那覇, 沖縄
English: