発光分光計測を用いたプロセスプラズマの診断

Publication Information

Title

Japanese:	発光分光計測を用いたプロセスプラズマの診断
English:	Optical Emission Spectroscopy Measurement of Processing Plasmas

Author

Japanese:	赤塚洋.
English:	HIROSHI AKATSUKA.

Language

Japanese

Journal/Book name

Japanese:	電気学会論文誌A 基礎・材料・共通部門誌
English:	IEEJ Trans. FM

Volume, Number, Page

Vol. 130 No. 10 pp. 892-898

Published date

Oct. 2010

Publisher

Japanese:	社団法人電気学会
English:	The INstitute of Electrical Engineers of Japan

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL