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Title
Japanese: 
English:Three-dimensional nano-motion system for SPM-based CMM 
Author
Japanese: 澤野 宏, 後閑 利通, 吉岡 勇人, 新野 秀憲.  
English: Hiroshi Sawano, Toshimichi Gokan, Hayato Yoshioka, Hidenori Shinno.  
Language English 
Journal/Book name
Japanese: 
English:Journal of Advanced Mechanical Design, Systems, and Manufacturing 
Volume, Number, Page Vol. 4    No. 6    pp. 1192-1200
Published date Oct. 2010 
Publisher
Japanese: 
English:The Japan Society of Mechanical Engineers 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
Official URL http://www.i-product.biz/jsme/data/jamdsm/jamdsm_index.html
 
DOI https://doi.org/10.1299/jamdsm.4.1192
Abstract Demands for measurement of three dimensional (3D) micro-geometries over a large area have recently increased in a variety of industries. In order to meet such requirements, it is necessary to realize a novel coordinate measuring machine (CMM) with a three-dimensional nano-motion system which has high resolution, high response and large measuring area. In this study, a three-dimensional nano-motion system was developed for a scanning probe microscopy (SPM) based CMM with nanometer spatial resolution. The system developed is composed of an X-Y planar nano-motion table system driven by voice coil motors (VCMs), a Z axis nano-motion system driven by a hybrid actuator and a probe holder that equipped with SPM probes. Performance evaluation results confirm that the system simultaneously achieves a long travel range, a high positioning resolution and a high stability.

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