RF可変受動素子実現に向けたAll Metal MEMS静電アクチュエータ

Publication Information

Title

Japanese:	RF可変受動素子実現に向けたAll Metal MEMS静電アクチュエータ
English:	All Metal MEMS Electrostatic Actuator for RF Variable Passive Element

Author

Japanese:	白根篤史, 水落裕, 天川修平, 石原昇, 益一哉.
English:	Atsushi Shirane, Yutaka Mizuochi, Shuhei Amakawa, Noboru Ishihara, Kazuya Masu.

Language

Japanese

Journal/Book name

Japanese:	応用物理学会集積化 MEMS 技術研究会主催集積化 MEMS シンポジウム 2010
English:

Volume, Number, Page

pp. 1-4

Published date

Oct. 2010

Publisher

Japanese:	応用物理学会
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: