V型超音波モータを用いた高速高分解能ステージ

Publication Information

Title

Japanese:	V型超音波モータを用いた高速高分解能ステージ
English:

Author

Japanese:	阿隅一将, 福永了一, 稲田豊, 藤村健, 黒澤実.
English:	Kazumasa Asumi, Ryoichi Fukunaga, 稲田豊, Takeshi Fujimura, Minoru Kuribayashi Kurosawa.

Language

Japanese

Journal/Book name

Japanese:	超音波 TECHNO
English:

Volume, Number, Page

vol. 22 no. 3 pp. 62-65

Published date

Mar. 2010

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: