Effects of plasma dynamics on the EUV emission from laser assisted discharge produced Sn plasma EUV source

Publication Information

Title

Japanese:
English:	Effects of plasma dynamics on the EUV emission from laser assisted discharge produced Sn plasma EUV source

Author

Japanese:	ｽﾞｷｭｼ, 山田淳三郎, 岸望, 渡邊正人, 沖野晃俊, 堀岡一彦, 堀田栄喜.
English:	Qiushi Zhu, Junzaburo Yamada, Nozomu Kishi, Masato Watanabe, Akitoshi Okino, Kazuhiko Horioka, Eiki Hotta.

Language

English

Journal/Book name

Japanese:
English:	Web

Volume, Number, Page

Published date

Nov. 2010

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2010 International Symposium on Extreme Ultraviolet Lithography

Conference site

Japanese:
English:	Kobe, Japan