Digitally Controllable RF MEMS Inductor

Publication Information

Title

Japanese:
English:	Digitally Controllable RF MEMS Inductor

Author

Japanese:	白根篤史, 水落裕, 天川修平, 石原昇, 益一哉.
English:	Atsushi Shirane, Yutaka Mizuochi, Shuhei Amakawa, Noboru Ishihara, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:	Advanced Metallization Conference 2010: 20th Asisan Session (ADMETA2010)

Volume, Number, Page

pp. 82-83

Published date

Oct. 2010

Publisher

Japanese:
English:	Advanced Metallization Conference 2010: 20th Asisan Session (ADMETA2010)

Conference name

Japanese:
English:	Advanced Metallization Conference 2010: 20th Asisan Session (ADMETA2010)

Conference site

Japanese:
English:	Tokyo, Japan