Study on Sn-Fueled Discharge Produced Plasma (DPP) Extreme Ultraviolet (EUV) Source

Publication Information

Title

Japanese:
English:	Study on Sn-Fueled Discharge Produced Plasma (DPP) Extreme Ultraviolet (EUV) Source

Author

Japanese:	ｽﾞｷｭｼ, 山田淳三郎, 岸望, 細貝知直, 渡邊正人, 沖野晃俊, 堀田栄喜.
English:	Qiushi Zhu, Junzaburo Yamada, Nozomu Kishi, Tomonao Hosokai, Masato Watanabe, Akitoshi Okino, Eiki Hotta.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

July 2008

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 2nd Japanese-German Student Workshop on Plasma Science and Technology

Conference site

Japanese:
English:	Germany