EUV Radiation from Laser Triggered Tin Target Discharge Produced Plasma

Publication Information

Title

Japanese:
English:	EUV Radiation from Laser Triggered Tin Target Discharge Produced Plasma

Author

Japanese:	ｽﾞｷｭｼ, 山田淳三郎, 岸望, 渡邊正人, 沖野晃俊, 堀田栄喜.
English:	Qiushi Zhu, Junzaburo Yamada, Nozomu Kishi, Masato Watanabe, Akitoshi Okino, Eiki Hotta.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 2008

Publisher

Japanese:
English:	SPIE

Conference name

Japanese:
English:	2008 International Workshop on EUV Lithography

Conference site

Japanese:
English:	Maui, Hawaii, USA