Plasma Dynamics in Laser Triggered Vacuum Arc Sn DPP EUV Source

Publication Information

Title

Japanese:
English:	Plasma Dynamics in Laser Triggered Vacuum Arc Sn DPP EUV Source

Author

Japanese:	堀田栄喜, 岸望, 山田淳三郎, ｽﾞｷｭｼ, 細貝知直, 渡邊正人, 沖野晃俊.
English:	Eiki Hotta, Nozomu Kishi, Junzaburo Yamada, Qiushi Zhu, Tomonao Hosokai, Masato Watanabe, Akitoshi Okino.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Oct. 2008

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2008 International Symposium on Extreme Ultraviolet Lithography

Conference site

Japanese:
English:	Lake Tahoe, CA, USA