Development of Xenon Gas-Jet Z-Pinch Discharge and Laser Triggered Tin Discharge Light Sources for EUV Lithography

Publication Information

Title

Japanese:
English:	Development of Xenon Gas-Jet Z-Pinch Discharge and Laser Triggered Tin Discharge Light Sources for EUV Lithography

Author

Japanese:	作地修, Jiang Fei, 山田淳三郎, ｽﾞｷｭｼ, 渡邊正人, 河村徹, 沖野晃俊, 堀岡一彦, 堀田栄喜.
English:	Osamu Sakuchi, Fei Jiang, Junzaburo Yamada, Qiushi Zhu, Masato Watanabe, Tohru Kawamura, Akitoshi Okino, Kazuhiko Horioka, Eiki Hotta.

Language

English

Journal/Book name

Japanese:
English:	ICPP2008 Abstracts

Volume, Number, Page

FG-P3-079 p. 349

Published date

Sept. 2008

Publisher

Japanese:
English:	JSPF

Conference name

Japanese:
English:	14th International Congress on Plasma Physics

Conference site

Japanese:
English:	Fukuoka