Experimental Study on Xenon and Tin Discharge Produced Plasma EUV Light Source

Publication Information

Title

Japanese:
English:	Experimental Study on Xenon and Tin Discharge Produced Plasma EUV Light Source

Author

Japanese:	渡邊正人, 岸望, 山田淳三郎, 作地修, Jiang Fei, ｽﾞｷｭｼ, 沖野晃俊, 堀岡一彦, 堀田栄喜.
English:	Masato Watanabe, Nozomu Kishi, Junzaburo Yamada, Osamu Sakuchi, Jiang Fei, Zhu Qiushi, Akitoshi Okino, Kazuhiko Horioka, Eiki Hotta.

Language

English

Journal/Book name

Japanese:
English:	IEEE Conference Record Abstracts The 35th IEEE International Conference on Plasma Science

Volume, Number, Page

1P67 p. 170

Published date

June 2008

Publisher

Japanese:
English:	IEEE

Conference name

Japanese:
English:	The 35th IEEE International Conference on Plasma Science

Conference site

Japanese:
English:	Karlsruhe, Germany