レーザトリガ型Sn EUV放電光源の開発

Publication Information

Title

Japanese:	レーザトリガ型Sn EUV放電光源の開発
English:	Development of Laser Triggered Sn Discharge EUV Light Source

Author

Japanese:	山田淳三郎, ｽﾞｷｭｼ, 岸望, 渡邊正人, MASNAVI MAJID, 沖野晃俊, 河村徹, 堀岡一彦, 堀田栄喜.
English:	Junzaburo Yamada, Qiushi Zhu, Nozomu Kishi, Masato Watanabe, Majid Masnavi, Akitoshi Okino, Tohru Kawamura, Kazuhiko Horioka, Eiki Hotta.

Language

Japanese

Journal/Book name

Japanese:	電気学会パルスパワー・放電合同研究会資料
English:	The Papers of Joint Technical Meeting on Pulsed Power Technology and Electrical Discharges

Volume, Number, Page

PPT-08-22/ED-08-51 pp. 37-42

Published date

May 2008

Publisher

Japanese:	電気学会
English:	IEE Japan

Conference name

Japanese:	パルスパワー・放電合同研究会
English:	Joint Technical Meeting on Pulsed Power Technology and Electrical Discharges

Conference site

Japanese:	東大阪
English:	Higashi-Osaka