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Publication Information
Title
Japanese:
レーザトリガ型Sn EUV放電光源の開発
English:
Development of Laser Triggered Sn Discharge EUV Light Source
Author
Japanese:
山田 淳三郎
,
ズ キュシ
,
岸 望
,
渡邊 正人
,
MASNAVI MAJID
,
沖野 晃俊
,
河村 徹
,
堀岡 一彦
,
堀田 栄喜
.
English:
Junzaburo Yamada
,
Qiushi Zhu
,
Nozomu Kishi
,
Masato Watanabe
,
Majid Masnavi
,
Akitoshi Okino
,
Tohru Kawamura
,
Kazuhiko Horioka
,
Eiki Hotta
.
Language
Japanese
Journal/Book name
Japanese:
電気学会パルスパワー・放電合同研究会資料
English:
The Papers of Joint Technical Meeting on Pulsed Power Technology and Electrical Discharges
Volume, Number, Page
PPT-08-22/ED-08-51 pp. 37-42
Published date
May 2008
Publisher
Japanese:
電気学会
English:
IEE Japan
Conference name
Japanese:
パルスパワー・放電合同研究会
English:
Joint Technical Meeting on Pulsed Power Technology and Electrical Discharges
Conference site
Japanese:
東大阪
English:
Higashi-Osaka
©2007
Tokyo Institute of Technology All rights reserved.