State of the Art and Future of the Fusion of MEMS and Circuits

Publication Information

Title

Japanese:
English:	State of the Art and Future of the Fusion of MEMS and Circuits

Author

Japanese:	Kazuya Masu.
English:	Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:	The International Solid-State Circuits Conference 2010 (ISSCC 2010)

Volume, Number, Page

Published date

Feb. 2010

Publisher

Japanese:
English:	The International Solid-State Circuits Conference 2010 (ISSCC 2010)

Conference name

Japanese:
English:	The International Solid-State Circuits Conference 2010 (ISSCC 2010)

Conference site

Japanese:
English:	San Francisco