高周波低圧プラズマCVDにおける発光分光計測

Publication Information

Title

Japanese:	高周波低圧プラズマCVDにおける発光分光計測
English:	Optical Emission Spectroscopy Measurement of High-frequency Low-pressure at Plasma-enhanced Chemical Vapor Deposition

Author

Japanese:	湯地敏史, 清田佑一, 川野美延, 中林健一, 田代真一, 田中学, 赤塚洋.
English:	Toshifumi Yuji, 清田佑一, 川野美延, 中林健一, 田代真一, 田中学, HIROSHI AKATSUKA.

Language

Japanese

Journal/Book name

Japanese:	平成２３年電気学会全国大会講演論文集
English:	The 2011 Annual Meeting Record, I.E.E. Japan

Volume, Number, Page

# 1 p. 241

Published date

Mar. 2011

Publisher

Japanese:	社団法人電気学会
English:	The Institute of Electrical Engineers of Japan

Conference name

Japanese:	平成２３年電気学会全国大会
English:	The 2011 Annual Meeting, I.E.E. Japan

Conference site

Japanese:	大阪大学豊中キャンパス
English:	Osaka University, Toyonaka Campus, Osaka