Experimental and numerical analyses on recovery of polymer deformation after demolding in the hot embossing process

Publication Information

Title

Japanese:
English:	Experimental and numerical analyses on recovery of polymer deformation after demolding in the hot embossing process

Author

Japanese:	H. Takagi, M. Takahashi, R. Maeda, 大西有希, Y. Iriye, T. Iwasaki, Y. Hirai.
English:	H. Takagi, M. Takahashi, R. Maeda, Y. Onishi, Y. Iriye, T. Iwasaki, Y. Hirai.

Language

English

Journal/Book name

Japanese:
English:	Journal of Vacuum Science and Technology B

Volume, Number, Page

Vol. 26 No. 6 pp. 2399-2403

Published date

2008

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL