Numerical and Experimental Analysis of Intermittent Line-and-Space Patterns in Thermal Nanoimprint

Publication Information

Title

Japanese:
English:	Numerical and Experimental Analysis of Intermittent Line-and-Space Patterns in Thermal Nanoimprint

Author

Japanese:	大西有希, Y.Hirai, 高木秀樹, M.Takahashi, T.Tanabe, R.Maeda, Y.Iriye.
English:	Y.Onishi, Y.Hirai, 高木秀樹, M.Takahashi, T.Tanabe, R.Maeda, Y.Iriye.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Vol. 47 No. 6 pp. 5145-5150

Published date

2008

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL