Analysis of time dependent polymer deformation based on a viscoelastic model in thermal imprint process

Publication Information

Title

Japanese:
English:	Analysis of time dependent polymer deformation based on a viscoelastic model in thermal imprint process

Author

Japanese:	H. Takagi, M.Takahashi, R.Maeda, 大西有希, Y.Iriye, T.Iwasaki, Y.Hirai.
English:	H. Takagi, M.Takahashi, R.Maeda, Y.Onishi, Y.Iriye, T.Iwasaki, Y.Hirai.

Language

English

Journal/Book name

Japanese:
English:	Microelectronic Engineering

Volume, Number, Page

Vol. 85 No. 5 pp. 902-906

Published date

May 28, 2008

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL