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Publication Information
Title
Japanese:
English:
Time Evolution Analysis of the Resist Profile in Thermal Nanoimprint
Author
Japanese:
M.Nishihata,
大西 有希
, T.Iwasaki, K.Okuda, Y.Iriye, Y.Hirai.
English:
M.Nishihata,
Y.Onishi
, T.Iwasaki, K.Okuda, Y.Iriye, Y.Hirai.
Language
English
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
2006
Publisher
Japanese:
English:
Conference name
Japanese:
English:
5th Nanoprint and Nanoimprint Technology
Conference site
Japanese:
English:
©2007
Tokyo Institute of Technology All rights reserved.