Time Evolution Analysis of the Resist Profile in Thermal Nanoimprint

Publication Information

Title

Japanese:
English:	Time Evolution Analysis of the Resist Profile in Thermal Nanoimprint

Author

Japanese:	M.Nishihata, 大西有希, T.Iwasaki, K.Okuda, Y.Iriye, Y.Hirai.
English:	M.Nishihata, Y.Onishi, T.Iwasaki, K.Okuda, Y.Iriye, Y.Hirai.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:	5th Nanoprint and Nanoimprint Technology

Conference site

Japanese:
English: