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Title
Japanese:熱ナノインプリントにおけるレジスト形状の時 間変形解析（圧力, 初期膜厚依存性） 
English: 
Author
Japanese: 田辺聡明, 大西有希, 柴田真由子, 川田博昭, 平井義彦.  
English: 田辺聡明, YUKI ONISHI, 柴田真由子, 川田博昭, 平井義彦.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date 2007 
Publisher
Japanese: 
English: 
Conference name
Japanese:第68回応用物理学会学術講演会 
English: 
Conference site
Japanese: 
English: 

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