Time Evolution of ResistDeformation in Thermal Nanoimprint Lithography

Publication Information

Title

Japanese:
English:	Time Evolution of ResistDeformation in Thermal Nanoimprint Lithography

Author

Japanese:	Y.Hirai, 大西有希, T.Tanabe, M.Shibata, T.Iwasaki, Y.Iriye.
English:	Y.Hirai, Y.Onishi, T.Tanabe, M.Shibata, T.Iwasaki, Y.Iriye.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:	6th Nanoprint and Nanoimprint Technology (NNT)

Conference site

Japanese:
English: