A Newly Developed AFM-based Three Dimensional Profile Measuring System

Publication Information

Title

Japanese:
English:	A Newly Developed AFM-based Three Dimensional Profile Measuring System

Author

Japanese:	澤野宏, 綾田翔, 吉岡勇人, 新野秀憲.
English:	Hiroshi SAWANO, Sho AYADA, Hayato YOSHIOKA, Hidenori SHINNO.

Language

English

Journal/Book name

Japanese:
English:	Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology

Volume, Number, Page

Vol. 1 pp. 108-112

Published date

May 2011

Publisher

Japanese:
English:

Conference name

Japanese:
English:	11th International Conference of the European Society for Precision Engineering and Nanotechnology

Conference site

Japanese:	コモ
English:	Lake Como

Official URL