A Hybrid Actuator-driven Compact Tilting Motion Table System for Multi-axis Ultraprecision Machine Tool

Publication Information

Title

Japanese:
English:	A Hybrid Actuator-driven Compact Tilting Motion Table System for Multi-axis Ultraprecision Machine Tool

Author

Japanese:	林遵, 吉岡勇人, 新野秀憲, 澤野宏.
English:	Mamoru Hayashi, Hayato YOSHIOKA, Hidenori SHINNO, Hiroshi Sawano.

Language

English

Journal/Book name

Japanese:
English:	Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology

Volume, Number, Page

Vol. 2 pp. 19-22

Published date

May 2011

Publisher

Japanese:
English:

Conference name

Japanese:
English:	11th International Conference of the European Society for Precision Engineering and Nanotechnology

Conference site

Japanese:	コモ
English:	Lake Como

Official URL