A Study on the Effect of Sublimation Source on the Properties of Amorphous Carbon Films Deposited in Electron Beam Excited Plasma

Publication Information

Title

Japanese:
English:	A Study on the Effect of Sublimation Source on the Properties of Amorphous Carbon Films Deposited in Electron Beam Excited Plasma

Author

Japanese:	ﾊﾞｰｴｽﾞﾀｶﾞﾋﾞﾊﾒﾄﾞ, 平田敦.
English:	Taghavi Hamed Vaez, ATSUSHI HIRATA.

Language

English

Journal/Book name

Japanese:	第24回ダイヤモンドシンポジウム講演要旨集
English:

Volume, Number, Page

pp. 188-189

Published date

Nov. 17, 2010

Publisher

Japanese:
English:

Conference name

Japanese:	第24回ダイヤモンドシンポジウム
English:

Conference site

Japanese:
English: