Home >

news Help

Publication Information


Title
Japanese:電子ビーム励起プラズマ中でのC60フラーレン昇華によるアモルファスカーボン膜の合成 
English: 
Author
Japanese: 平田敦, ﾊﾞｰｴｽﾞﾀｶﾞﾋﾞ ﾊﾒﾄﾞ.  
English: ATSUSHI HIRATA, Taghavi Hamed Vaez.  
Language Japanese 
Journal/Book name
Japanese:精密工学会誌 
English: 
Volume, Number, Page Vol. 77    No. 6    pp. 571-575
Published date June 5, 2011 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
DOI https://doi.org/10.2493/jjspe.77.571

©2007 Tokyo Institute of Technology All rights reserved.