Ultra Precise Positioning of a Stage Driven by Pneumatic Bellows

Publication Information

Title

Japanese:
English:	Ultra Precise Positioning of a Stage Driven by Pneumatic Bellows

Author

Japanese:	Toshinori Fujita, 榊和敏, Yusuke Takagi, 川嶋健嗣, 香川利春.
English:	Toshinori Fujita, Kazutoshi Sakaki, Yusuke Takagi, Kenji Kawashima, Toshiharu Kagawa.

Language

English

Journal/Book name

Japanese:
English:	Int. J. of Automation Technology

Volume, Number, Page

Vol. 5 No. 4 pp. 580-511

Published date

July 25, 2011

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI