発光分光計測を用いたマイクロ波放電窒素プラズマのN2+の振動，回転温度評価

Publication Information

Title

Japanese:	発光分光計測を用いたマイクロ波放電窒素プラズマのN2+の振動，回転温度評価
English:	Estimation of Vibrational and Rotational Temperatures of N2+ of Microwave Discharge Nitrogen Plasma by Optical Emission Spectroscopy Measurement

Author

Japanese:	川野泰和, 根津篤, 松浦治明, 赤塚洋.
English:	Hirokazu Kawano, Atsushi Nezu, HARUAKI MATSUURA, HIROSHI AKATSUKA.

Language

Japanese

Journal/Book name

Japanese:	電気学会研究会資料
English:	The Papers of Technical Meeting on Plasma Science and Technology, IEE Japan

Volume, Number, Page

PST-11-036~045 pp. 15-18

Published date

Aug. 7, 2011

Publisher

Japanese:	社団法人電気学会
English:	The Institute of Electrical Engineers of Japan

Conference name

Japanese:	電気学会プラズマ研究会
English:	Technical Meeting on Plasma Science and Technology

Conference site

Japanese:	大阪市
English:	Osaka