Structure and Mechanical Properties of Diamond-Like Carbon Films Prepared from C2H2 and H2 Mixtures by Pulse Plasma Chemical Vapor Deposition

Publication Information

Title

Japanese:
English:	Structure and Mechanical Properties of Diamond-Like Carbon Films Prepared from C2H2 and H2 Mixtures by Pulse Plasma Chemical Vapor Deposition

Author

Japanese:	Shinji FUJIMOTO, 赤坂大樹, Tsuneo SUZUKI, 大竹尚登, 高井治.
English:	Shinji FUJIMOTO, Hiroki AKASAKA, Tsuneo SUZUKI, Naoto OHTAKE, Osamu TAKAI.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Vol. 49 pp. 075501-1～075501-9

Published date

Sept. 6, 2010

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: