Trajectory control of pneumatic servo table with air bearing

Publication Information

Title

Japanese:
English:	Trajectory control of pneumatic servo table with air bearing

Author

Japanese:	Li Jun, 川嶋健嗣, 藤田壽憲, 香川利春.
English:	Jun Li, Kenji Kawashima, Toshinori Fujita, Toshiharu Kagawa.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. 1473-1478

Published date

Sept. 13, 2011

Publisher

Japanese:
English:

Conference name

Japanese:
English:	SICE Annual Conference 2011

Conference site

Japanese:
English: