Numerical study of the initial gas distribution on a gas jet plasma EUV source

Publication Information

Title

Japanese:
English:	Numerical study of the initial gas distribution on a gas jet plasma EUV source

Author

Japanese:	Huang Bin, Xie Bin, Jiang Fei, 冨塚拓, 滝本泰大, 渡邊正人, 肖鋒, 堀田栄喜.
English:	Bin Huang, Bin Xie, Fei Jiang, Taku Tomizuka, Yasuhiro Takimoto, Masato Watanabe, Feng Xiao, Eiki Hotta.

Language

English

Journal/Book name

Japanese:
English:	Proceedings of 2011 Annual Conference of Fundamentals and Materials Society IEE Japan

Volume, Number, Page

Published date

Sept. 21, 2011

Publisher

Japanese:
English:	IEE Japan

Conference name

Japanese:
English:	2011 Annual Conference of Fundamentals and Materials Society IEE Japan

Conference site

Japanese:
English:	Tokyo