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Title
Japanese:集積化 CMOSCMOS--MEMSMEMS のための統合設計技術統合設計技術の検討 (2) 
English:A Multi-physics Simulation Technique for Integrated CMOS-MEMS (2) 
Author
Japanese: 小西 敏文, 丸山 智史, 松島 隆明, 三田 信, 町田 克之, 伊藤 浩之, 石原 昇, 益一哉, 藤田 博之, 年吉 洋.  
English: Toshifumi Konishi, Tomofumi Maruyama, Takaaki Matsushima, Makoto Mita, Katsuyuki Machida, Hiroyuki Ito, Noboru Ishihara, Kazuya Masu, Hiroyuki Fujita, Hiroshi Toshiyoshi.  
Language Japanese 
Journal/Book name
Japanese:第 72 回応用物理学会学術講演会 講演予稿集(2011 秋 山形大学) 30a-E-14 
English: 
Volume, Number, Page         p. 22-014
Published date Aug. 30, 2011 
Publisher
Japanese:応用物理学会 
English: 
Conference name
Japanese:第 72 回応用物理学会学術講演会 
English: 
Conference site
Japanese:山形 
English: 

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