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Publication Information
Title
Japanese:
集積化 CMOSCMOS--MEMSMEMS のための統合設計技術統合設計技術の検討 (2)
English:
A Multi-physics Simulation Technique for Integrated CMOS-MEMS (2)
Author
Japanese:
小西 敏文
,
丸山 智史
,
松島 隆明
,
三田 信
,
町田 克之
,
伊藤 浩之
,
石原 昇
,
益一哉
,
藤田 博之
,
年吉 洋
.
English:
Toshifumi Konishi
,
Tomofumi Maruyama
,
Takaaki Matsushima
,
Makoto Mita
,
Katsuyuki Machida
,
Hiroyuki Ito
,
Noboru Ishihara
,
Kazuya Masu
,
Hiroyuki Fujita
,
Hiroshi Toshiyoshi
.
Language
Japanese
Journal/Book name
Japanese:
第 72 回応用物理学会学術講演会 講演予稿集(2011 秋 山形大学) 30a-E-14
English:
Volume, Number, Page
p. 22-014
Published date
Aug. 30, 2011
Publisher
Japanese:
応用物理学会
English:
Conference name
Japanese:
第 72 回応用物理学会学術講演会
English:
Conference site
Japanese:
山形
English:
©2007
Tokyo Institute of Technology All rights reserved.