ＡＦＭプローブを用いた三次元形状計測システム

Publication Information

Title

Japanese:	ＡＦＭプローブを用いた三次元形状計測システム
English:	Three-Dimensional Profile Measuring System with AFM Probe

Author

Japanese:	綾田翔, 澤野宏, 吉岡勇人, 新野秀憲.
English:	Sho AYADA, Hiroshi SAWANO, Hayato YOSHIOKA, Hidenori SHINNO.

Language

Japanese

Journal/Book name

Japanese:	日本機械学会論文集（Ｃ編）
English:	Transactions of the Japan Society of Mechanical Engineers(JSME)

Volume, Number, Page

Vol. 77 No. 782 pp. 3597-3607

Published date

Oct. 25, 2011

Publisher

Japanese:	日本機械学会
English:	The Japan Society of Mechanical Engineers(JSME)

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI

Award

平成24年度　工作機械技術振興賞「論文賞」