Low-loss Amorphous Silicon Multilayer Waveguides Vertically Stacked on Silicon-on-Insulator Substrate

Publication Information

Title

Japanese:
English:	Low-loss Amorphous Silicon Multilayer Waveguides Vertically Stacked on Silicon-on-Insulator Substrate

Author

Japanese:	カンジュンヒョン, 渥美裕樹, 小田学, 雨宮智宏, 西山伸彦, 荒井滋久.
English:	JoonHyun Kang, Yuki Atsumi, Manabu Oda, Tomohiro Amemiya, Nobuhiko Nishiyama, SHIGEHISA ARAI.

Language

English

Journal/Book name

Japanese:
English:	Jpn. J. Appl. Phys.

Volume, Number, Page

Vol. 50 No. 12 pp. 120208

Published date

Nov. 28, 2011

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI