Nano-sized PT Lines and Spaces Patterned by Nanoimprint Lithography and physical Dry-etching Method

Publication Information

Title

Japanese:
English:	Nano-sized PT Lines and Spaces Patterned by Nanoimprint Lithography and physical Dry-etching Method

Author

Japanese:	Bui Nguyen Quoc Trinh, 金田敏彦, 宮迫毅明, Pham Van Thanh, Phan Trong Tue, 徳光永輔, 下田達也.
English:	Bui Nguyen Quoc Trinh, Toshihiko Kaneda, Takaaki Miyasako, Pham Van Thanh, Phan Trong Tue, Eisuke Tokumitsu, Tatsuya Shimoda.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Oct. 2011

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 10th international conference on Nanoimprint and Nanoprint Technology (NNT 2011)

Conference site

Japanese:
English:	Jeju