Downsized Ceramic Atomic Oxygen Generator and Its Application to Fabrication of TiO<sub>2</sub>:N Films

Publication Information

Title

Japanese:
English:	Downsized Ceramic Atomic Oxygen Generator and Its Application to Fabrication of TiO₂:N Films

Author

Japanese:	尾島大樹, 嶋一成, 千葉哲也, 平松秀典, 細野秀雄, 林克郎.
English:	Daiki Ojima, Kazunari Shima, Tetsuya Chiba, Hidenori Hiramatsu, Hideo Hosono, Katsuro Hayashi.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 23, 2011

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The Fifth International Conference on the Science and Technology for Advanced Ceramics (STAC-5)

Conference site

Japanese:
English: