セラミック型原子状酸素源の小型化と N添加TiO<sub>2</sub>薄膜作成への応用

Publication Information

Title

Japanese:	セラミック型原子状酸素源の小型化と N添加TiO₂薄膜作成への応用
English:

Author

Japanese:	尾島大樹, 嶋一成, 千葉哲也, 平松秀典, 細野秀雄, 林克郎.
English:	Daiki Ojima, Kazunari Shima, Tetsuya Chiba, hidenori hiramatsu, HIDEO HOSONO, KATSURO HAYASHI.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Aug. 31, 2011

Publisher

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Conference name

Japanese:	応用物理学会2011秋季
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Conference site

Japanese:
English: