Pinch dynamics of the 13.5 nm EUV-emitting plasma in a LA-DPP source

Publication Information

Title

Japanese:
English:	Pinch dynamics of the 13.5 nm EUV-emitting plasma in a LA-DPP source

Author

Japanese:	ｽﾞｷｭｼ, 山田淳三郎, 岸望, 細貝知直, 渡邊正人, 沖野晃俊, 堀岡一彦, 堀田栄喜.
English:	Qiushi Zhu, Junzaburo Yamada, Nozomu Kishi, Tomonao Hosokai, Masato watanabe, Akitoshi Okino, Kazuhiko Horioka, Eiki Hotta.

Language

English

Journal/Book name

Japanese:
English:	2011 International Academic Symposium on Optoeletcronics and Microelectronics Technology (IASOMT 2011)

Volume, Number, Page

pp. 175-178

Published date

Nov. 13, 2011

Publisher

Japanese:
English:	IEEE

Conference name

Japanese:
English:	2011 International Academic Symposium on Optoeletcronics and Microelectronics Technology (IASOMT 2011)

Conference site

Japanese:
English:	Harbin

DOI