Estimation of electron temperature and density of the decay plasma in a LADPP EUV source

Publication Information

Title

Japanese:
English:	Estimation of electron temperature and density of the decay plasma in a LADPP EUV source

Author

Japanese:	Zhu Qiushi, 武藤敬宏, 山田淳三郎, 岸望, 渡辺正人, 沖野晃俊, 堀岡一彦, 堀田栄喜.
English:	Zhu Qiushi, Takahiro Muto, Junzaburo Yamada, Nozomu Kishi, Masato watanabe, Akitoshi Okino, Kazuhiko Horioka, Eiki Hotta.

Language

English

Journal/Book name

Japanese:	電気学会研究会資料, プラズマ／パルスパワー合同研究会
English:	The Papers of Joint Technical Meeting on Plasma Science and Technology and Pulsed Power Technology

Volume, Number, Page

pp. 15-20

Published date

Dec. 28, 2011

Publisher

Japanese:	電気学会
English:	IEE Japan

Conference name

Japanese:	電気学会研究会資料, プラズマ／パルスパワー合同研究会
English:	Joint Technical Meeting on Plasma Science and Technology and Pulsed Power Technology

Conference site

Japanese:	横浜
English:	Yokohama