Estimation of electron temperature and density of the decay plasma in a laser-assisted discharge plasma extreme ultraviolet source by using a modified Stark broadening method

Publication Information

Title

Japanese:
English:	Estimation of electron temperature and density of the decay plasma in a laser-assisted discharge plasma extreme ultraviolet source by using a modified Stark broadening method

Author

Japanese:	ｽﾞｷｭｼ, 武藤敬宏, 山田淳三郎, 岸望, 渡邊正人, 沖野晃俊, 堀岡一彦, 堀田栄喜.
English:	Qiushi Zhu, Takahiro Muto, Junzaburo Yamada, Nozomu Kishi, Masato Watanabe, Akitoshi Okino, Kazuhiko Horioka, Eiki Hotta.

Language

English

Journal/Book name

Japanese:
English:	J. Appl. Phys.

Volume, Number, Page

Vol. 110

Published date

Dec. 30, 2011

Publisher

Japanese:
English:	American Insitute of Phyics

Conference name

Japanese:
English:

Conference site

Japanese:
English:

File

DOI