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Publication Information
Title
Japanese:
English:
Solid-state source of atomic oxygen for low-temperature oxidation processes: Application to pulsed laser deposition of TiO
2
:N films
Author
Japanese:
尾島 大樹
,
千葉 哲也
,
嶋 一成
,
平松 秀典
,
細野 秀雄
,
林 克郎
.
English:
Daiki Ojima
,
Tetsuya Chiba
,
Kazunari Shima
,
Hidenori Hiramatsu
,
Hideo Hosono
,
Katsuro Hayashi
.
Language
English
Journal/Book name
Japanese:
English:
Review of Scientific Instruments
Volume, Number, Page
83 023903
Published date
Feb. 13, 2012
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
©2007
Tokyo Institute of Technology All rights reserved.