Solid-state source of atomic oxygen for low-temperature oxidation processes: Application to pulsed laser deposition of TiO<sub>2</sub>:N films

Publication Information

Title

Japanese:
English:	Solid-state source of atomic oxygen for low-temperature oxidation processes: Application to pulsed laser deposition of TiO₂:N films

Author

Japanese:	尾島大樹, 千葉哲也, 嶋一成, 平松秀典, 細野秀雄, 林克郎.
English:	Daiki Ojima, Tetsuya Chiba, Kazunari Shima, Hidenori Hiramatsu, Hideo Hosono, Katsuro Hayashi.

Language

English

Journal/Book name

Japanese:
English:	Review of Scientific Instruments

Volume, Number, Page

83 023903

Published date

Feb. 13, 2012

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: