Effects of low-temperature ozone annealing on operation characteristics of amorphous In-Ga-Zn-O thin-film transistors

Publication Information

Title

Japanese:
English:	Effects of low-temperature ozone annealing on operation characteristics of amorphous In-Ga-Zn-O thin-film transistors

Author

Japanese:	井手啓介, 菊地優友, 野村研二, 神谷利夫, 細野秀雄.
English:	Keisuke Ide, Yutomo Kikuchi, Kenji Nomura, Toshio Kamiya, Hideo Hosono.

Language

English

Journal/Book name

Japanese:
English:	Thin Solid Films

Volume, Number, Page

Vol. 520 pp. 3787-3790

Published date

2012

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI