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Publication Information
Title
Japanese:
English:
Difference in Rotational Temperatures between Neutral Molecules and Molecular Ions of N2/O2 Plasmas of Low-Pressure Microwave Discharge
Author
Japanese:
赤塚 洋
,
川野 泰和
, 直井 浩一,
根津 篤
,
松浦 治明
.
English:
Hiroshi Akatsuka
,
Hirokazu Kawano
, Koichi Naoi,
Atsushi Nezu
,
Haruaki Matsuura
.
Language
English
Journal/Book name
Japanese:
2012年春季 第59回応用物理学関係連合講演会 講演予稿集
English:
Extended Abstracts of the 59th Spring Meeting 2012; The Japan Society of Applied Physics and the Related Societies
Volume, Number, Page
p. 08-161
Published date
Feb. 29, 2012
Publisher
Japanese:
公益社団法人 応用物理学会
English:
The Japan Society of Applied Physics
Conference name
Japanese:
2012年春季 第59回応用物理学関係連合講演会
English:
the 59th Spring Meeting 2012; The Japan Society of Applied Physics and the Related Societies
Conference site
Japanese:
東京
English:
Tokyo
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Tokyo Institute of Technology All rights reserved.