Diﬀerence in Rotational Temperatures between Neutral Molecules and Molecular Ions of N2/O2 Plasmas of Low-Pressure Microwave Discharge

Publication Information

Title

Japanese:
English:	Diﬀerence in Rotational Temperatures between Neutral Molecules and Molecular Ions of N2/O2 Plasmas of Low-Pressure Microwave Discharge

Author

Japanese:	赤塚洋, 川野泰和, 直井浩一, 根津篤, 松浦治明.
English:	Hiroshi Akatsuka, Hirokazu Kawano, Koichi Naoi, Atsushi Nezu, Haruaki Matsuura.

Language

English

Journal/Book name

Japanese:	2012年春季第59回応用物理学関係連合講演会講演予稿集
English:	Extended Abstracts of the 59th Spring Meeting 2012; The Japan Society of Applied Physics and the Related Societies

Volume, Number, Page

p. 08-161

Published date

Feb. 29, 2012

Publisher

Japanese:	公益社団法人応用物理学会
English:	The Japan Society of Applied Physics

Conference name

Japanese:	2012年春季第59回応用物理学関係連合講演会
English:	the 59th Spring Meeting 2012; The Japan Society of Applied Physics and the Related Societies

Conference site

Japanese:	東京
English:	Tokyo