Cleaning Process for Semiconductor Equipment Process on Atmospheric-Pressure Non-Equilibrium DC Pulse Plasma Jet

Publication Information

Title

Japanese:
English:	Cleaning Process for Semiconductor Equipment Process on Atmospheric-Pressure Non-Equilibrium DC Pulse Plasma Jet

Author

Japanese:	湯地敏史, Y. Kiyota, Y. Okamura, H. Kinoshita, Mungkung Narong, 須崎嘉文, T. Hamada, 赤塚洋.
English:	T. Yuji, Y. Kiyota, Y. Okamura, H. Kinoshita, N. Mungkung, Y. Suzaki, T. Hamada, H. Akatsuka.

Language

English

Journal/Book name

Japanese:
English:	Proc. the Japan – Thailand – Lao P.D.R. Joint Friendship International Conference on Applied Electrical and Mechanical Engineering 2011

Volume, Number, Page

pp. 51-54

Published date

Sept. 21, 2011

Publisher

Japanese:
English:	Dept. Electrical Technology Education King Mongkut's University of Technology Thonburi (KMUTT)

Conference name

Japanese:
English:	The Japan – Thailand – Lao P.D.R. Joint Friendship International Conference on Applied Electrical and Mechanical Engineering 2011

Conference site

Japanese:	ノンハイ
English:	Nongkhai

Official URL