Planar Solenoidal Inductor in Radio Frequency Micro-Electro-Mechanical Systems Technology for Variable Inductor with Wide Tunable Range and High Quality Factor

Publication Information

Title

Japanese:
English:	Planar Solenoidal Inductor in Radio Frequency Micro-Electro-Mechanical Systems Technology for Variable Inductor with Wide Tunable Range and High Quality Factor

Author

Japanese:	白根篤史, 伊藤浩之, 石原昇, 益一哉.
English:	Atsushi Shirane, Hiroyuki Ito, Noboru Ishihara, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Vol. 51 p. 05EE02

Published date

May 21, 2012

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI