A newly developed nano-pattern generator equipped with an on-machine measuring function

Publication Information

Title

Japanese:
English:	A newly developed nano-pattern generator equipped with an on-machine measuring function

Author

Japanese:	澤野宏, 吉岡勇人, 新野秀憲.
English:	Hiroshi SAWANO, Hayato YOSHIOKA, Hidenori SHINNO.

Language

English

Journal/Book name

Japanese:
English:	Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology

Volume, Number, Page

Vol. 2 pp. 189-192

Published date

June 2012

Publisher

Japanese:
English:

Conference name

Japanese:
English:	12th International Conference of the European Society for Precision Engineering and Nanotechnology

Conference site

Japanese:	ストックホルム
English:	Stockholm

Official URL