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Title
Japanese: 
English:Nanoscale Etching and Flattening of Metals with Ozone Water 
Author
Japanese: 羽月竜治, 山本貴富喜.  
English: Ryuji Hatsuki, Takatoki Yamamoto.  
Language English 
Journal/Book name
Japanese: 
English:Nano Letters 
Volume, Number, Page Vol. 12    No. 6    pp. 3158-3161
Published date June 16, 2012 
Publisher
Japanese: 
English:ASC Publications 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
DOI https://doi.org/10.1021/nl301112r
Abstract Etchants used for metal etching are generally harmful to the environment. We propose an environmentally friendly method that uses ozone water to etch metals. We measured the dependencies of ozone water etching on the temperature and ozone concentration for several metals and evaluated the surface roughness of the etched surfaces. The etching rate was proportional to the dissolved ozone concentration, and the temperature and the surfaces were smoothed by etching.

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