ミストCVD法によるγ型Ga<sub>2</sub>O<sub>3</sub>のエピタキシャル安定化

Publication Information

Title

Japanese:	ミストCVD法によるγ型Ga₂O₃のエピタキシャル安定化
English:	Epitaxial stabilization of gamma-phase Ga₂O₃ thin films by Mist CVD

Author

Japanese:	大島孝仁, 中園敦巳, 向井章, 大友明.
English:	T. Oshima, T. Nakazono, A. Mukai, A. Ohtomo.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

July 12, 2012

Publisher

Japanese:
English:

Conference name

Japanese:	第31回電子材料シンポジウム
English:	31st Electronic Materials Symposium (EMS-31)

Conference site

Japanese:	伊豆市
English:	Izu City

Official URL