Non-contact prove method of ferroelectric property estimation of PbTiO3 based films for micro electro mechanical systems

Publication Information

Title

Japanese:
English:	Non-contact prove method of ferroelectric property estimation of PbTiO3 based films for micro electro mechanical systems

Author

Japanese:	江原祥隆, 宇津木覚, 中島光雅, Mohamed Tahar Chentir, 山田智明, 飯島高志, 西田謙, Takashi Yamamoto, 舟窪浩.
English:	Yoshitaka Ehara, Satoru Utsugi, Mitsumasa Nakajima, Mohamed Tahar Chentir, Tomoaki Yamada, Takashi Iijima, Ken Nishida, Takashi Yamamoto, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	J. Mater. Res.

Volume, Number, Page

Vol. 27 No. 11 pp. 1430-1435

Published date

2012

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI